Achieving Sustainability and Positive ROI with UPW Reclaim and Reuse

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چکیده

The need for recycling Modern microelectronics fabs are dependent upon a continuous flow of UPW for normal operations, requiring 500 cubic meters per hour or more to manufacture product. Each new fab uses 4,000 to 12,000 cubic meters per day just for wafer processing. As the industry continues to expand and develop more advanced technologies, an even greater burden is placed on limited water, sewer resources and local water infrastructure.

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تاریخ انتشار 2011